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> Pecvd 2" split single zone tube furnace with 4 channels
Pecvd 2" split single zone tube furnace with 4 channels
PECVD 2" Split Single Zone Tube Furnace with 4 Channels Gas Delivery & Vacuum System (Max. 1200C 10E-3 torr)
PECVD2-4LV is a compact PE-CVD tube furnace system (Plasma enhanced chemical vapor deposition), which consists of 500W RF plasma source, 2" split tube furnace, 4 channels precision mass flow meter with gas mixing tank, and high quality mechanical pump. The PE-CVD furnace is an ideal and affordable tool to deposit thin films or grow nano-wire from a gas state (vapor) to a solid state, and benefits:
* Lower temperature processing compared to conventional CVD.
* Film stress can be controlled by high/low frequency mixing techniques.
* Control over stoichiometry via process conditions.
* Offers a wide range of material deposition, including SiOx, SiNx, SiOxNy and Amorphous silicon (a-Si:H) deposition.
1200 Max. working temperature.
0 segments programmable precision digital temperature controller.
440 mm length single heating zone and 150 mm length constant temperate zone.
One pair of vacuum sealed flange with valves.
Input power: 208 240V AC input, single phase at max. 4KW.
Out-put power: 50 - 500W Max adjustable with +/- 1% stability.
RF frequency: 2 150 MHz adjustable with +/- 0.005% stability.
Power in-put: 1Kw, 206-240VAC.
Two stage mechanical vacuum pump installed in bottom case with max. vacuum pressure 10 -3 torr.
KFD25 adaptor and stainless steel pipe are connected between pump and tube flange with precision ball valve.
Digital vacuum pressure gauge and display are installed with the furnace.
4 precision mass flow meters with digital display are installed on bottom case to controll gas flow rate automatically.
Two MFC : Gas flow range from 0 200 scc accuracy and another two MFC 'ss flow range from 0- 50 SCC with 0.02%.
One gas mixing tank is installed on bottom case with liquid release valve.
4 stainless steel needle valves is installed on left side of bottom case to control 4 type gases mixing manually.
Gas inlet fitting: four 1/4NPS.
Gas outlet fitting: four 1/4NPS.
* Furnace: 550 x 380 x 520 mm .
* Bottom Mobile case: 600 x 600 x 597mm.
Warranty: One year, not include quartz tube damaged by user.
