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March px-1000 barrel plasma etcher/asher (operational)


Operational MARCH Model PX-1000 Barrel plasma asher/etcher. S/N 9349, 1999 Vintage
Super clean and well maintained system.
We checked it out in both Auto and Manual Modes.
Includes: ENI ACG-10B 1000 Watt @ 13.56 Mhz RF Supply, 4 Shelves (1 hot and three ground), Stainless Table, and Operation Manual.
Two Gas Inputs with 1 Porter 100 SCCM MFC (wired for four MFC's). (Holds up to 14 shelves). Operates in RIE, Downstream or Direct Plasma Modes.
Exterior Dimensions: 32" W x 24" H x 35" D
Weight 210 Lbs, not including RF Supply, ACG-10B weights Approx 100 Lbs
Stainless steel chamber Interior Dimensions: 18" H x 18" W x 24" D.
Work Shelves Surface Area: Power Shelf 13.75" W x 16.75" D, Ground Shelf 16" W x 17.5" D.
15 PSI of Process Gas, 60 PSI of N2 or CDA
Vacuum Pump requirements, 27 CFM, Vacuum is not included
Avaliable for inspection or demonstration, but we do not have the ability to support it, and therefore it's



March px-1000 barrel plasma etcher/asher (operational) March px-1000 barrel plasma etcher/asher (operational) March px-1000 barrel plasma etcher/asher (operational) March px-1000 barrel plasma etcher/asher (operational) March px-1000 barrel plasma etcher/asher (operational) March px-1000 barrel plasma etcher/asher (operational) March px-1000 barrel plasma etcher/asher (operational)