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Boc edwards QDP80 dry semiconductor drystar vacuum pump
BOC Edwards QDP80 Dry Semiconductor Drystar Vacuum Pump
This Edwards QDP-80 Dry Vacuum Pump is a four-stage, positive displacement rotary pump.
These "Dry Pumps" are ideal for the corrosive environhment of semiconductor processing. The applications range from light duty loadlock and sputtering to demanding processes including plasma etch, LPCVD, PECVD, and MOCVD.
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