Tristate Machinery Dismantlers Forum > INDIANA
> Motors and tools
> Inficon transpector 2 residual gas analyzer system rga
Inficon transpector 2 residual gas analyzer system rga
NEW in Box: Leybold/Inficon Transpector 2 Residual Gas Analysis System with a H100M Sensor (FC/EM)
Specifications are from Inficon and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
Can Be Used on Applied Materials Parts (AMAT):
AMAT Description: Analy, RGA Transpector Hi Performance Sensor
* Transpector 2 Controller, Model Number TSPTT100
* H100M Sensor (FC/EM), Part Number: 10231
* Heater Jacket, 117 Volts 65 Watts, Low Temp: 100 C High Temp: 250 C, Part Number: 900-066-P4
* Cables, Part Numbers: 900-040-G3 & 600-1003-P1
* Flange Extension Kit, Part Number: 900-041-G3
* Flange Extension Kit (Leybold) See, Part Number: 900-041-G3
* Power Supply & Power Cord, Part Number: 911-039-G1, Rev E.
Link to the Datasheet: Inficon Transpector 2 Residual Gas Analysis System Datasheet
Superior Sensitivity for Contamination Control:
The Transpector Gas Analysis System provides accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection in semiconductor manufacturing. In the Transpector 2, increased hydrogen sensitivity makes contaminants visible at sub-ppm levels, and four times faster scanning over low level signals with an expanded dynamic range provides cleaner data at lower detectable partial pressures.
* 100 amu systems with combination electron multiplier/Faraday cup
* partial pressure measurement from 1 x 10-4 Torr to 5 x 10-15 Torr
Sensor Length (Vacuum Side): 10.4" (26.4 cm)
Resolution: < 1 amu wide @ 10% peak height over the entire mass range (per 1993 AVS Recommended Practice)
Temperature Coefficient: < 1% of peak height per degree C (for FC Only) - (during an 8-hour period, after a half hour warm-up)
FC: 1 x 10-4 amps/Torr (7.6 x 10-5 mbar/Torr)
EM: 500 amps/Torr (380 mbar/Torr)
Minimum Detectable Partial Pressure1:
EM: 5 x 10-15 Torr (6.6 x 10-15 mbar)
Zero Blast Interference at Mass 2: < 100 ppm
Maximum Operating Pressure: 5 x 10-4 Torr (6.6 x 10-4 mbar)
Maximum Sensor Operating Temperature:
Maximum Bakeout Temperature (electronics removed): 350 C
Operating Temperature: 20 C to 50 C ambient
Power Input: 20 to 30 V DC, 9-pin male "D" connector, internally isolated from system ground
RS232 Serial Communications Interface: Nonisolated, baud selection 1200 through 9600, 9-pin female "D" connector, TxD, RxD, CTS, DTR
RS485 Addressable Communications Interface: Isolated, 4-wire, 57,600 baud fixed, half duplex, global address @ 0, fixed address 1 of 31, 9-pin female "D" connector, +TxD, -TxD, +RxD, -RxD
Relay Outputs: 4 relays, 24 V at 0.5 amps (1 for operational status, 3 for setpoint limits)
Inputs: 2 nonisolated TTL inputs, contact closure (1 for remote emission on, 1 for remote emission off); 2 differential analog inputs, 0 to 10 V DC
Electronics Enclosure: Drip-resistant
User-Configured Switches: 8-position DIP Switch - 5 positions: device address (1 of 31); Primary Link SElect (RS232/485); 2 positions: baud rate
LED Indicators (green): 1 for CPU status, 1 for emission status
Note 1: Minimum detectable partial pressure is calculated as the standard deviation of the noise (minimum detectable signal) divided by the sensitivity of the sensor (FC or EM) measured at a four-second dwell time.
* Picture 2 - Transpector 2 Controller
* Picture 4 - Box with Accessories #1
* Picture 5 - Box with Accessories #2
