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Edwards boc IL600 dry semiconductor vacuum pump
The BOC Edwards iL600 iL 600 Semiconductor Dry Vacuum Pump System Rebuilt
The iL600 Series operate under the most arduous conditions in the worlds top wafer manufacturing plants and have been proven to require zero periodic maintenance. The iL600 series provide applications specific to the semiconductor fabrication processes.iL600 Series pumps have been designed for clean applications such as load lock and transfer chambers and feature zero nitrogen consumption.
The Edwards IL600 IL 600 system has an LCDP70 dry pump, with an LCMB600 mechanical booster pump fitted to the inlet of the LCDP pump. This system is fully enclosed, and includes seismic restraints. A PDT, available as an accessory, enables you to manually operate the iL system and to display its status.
Every Edwards iL600 iL 600 subfab dry vacuum pump we sell goes through a rigorous rebuild process at our Albuquerque, New Mexico (NM) location. As each pump is rebuilt they are fully dismantled and all parts are decontaminated and inspected. Damaged or worn parts are replaced. All bearings, o-rings, seals, and gaskets are replaced. Rebuilt pumps are attached to our computer controlled pressure diagnostics system where their performance is monitored for 72-hours under varying load. Pumps are leak tested to ensure safety during operation. All sensors are tested and the final rebuilt Edwards iL600 subfab vacuum dry pump is cleaned and painted as required. We offer rebuild subfab services to rebuild you Edwards iL600 iL 600 dry vacuum pumps. Please call our office at (***) 872-0037 for more information about our subfab rebuild service. For detailed specs and instruction manual on this Edwards iL600 iL 600 subfab pump see AVAILABLE DOWNLOADS below.
Edwards DryPump iL 600 Spec Sheet.pdf
Product: The BOC Edwards iL600 iL 600 Semiconductor Dry Vacuum Pump System Rebuilt
