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> New durex, cast aluminum chill platen ~
New durex, cast aluminum chill platen ~
cast in platen heaters for wafer processing applications. These casts in bake and chill platens utilize a high-density mineral insulated heating element, formed to provide a specific heat profile and cast-in 99.7% pure aluminum. Cooling tubes of various materials can be run systematically with the heat pattern for uniform chill requirements. Temperature uniformity across the surface of the cast in platens can achieve 1% of the maximum operating temperature. Zero porosity of the castings offers increased operating temperatures to 450 C (850 F). Helium Leak test specifications of 1 x 108 cc/sec. are performed to guarantee integrity of the complete assembly. Precision machining of the cast in aluminum platens using CAD/CAM/CAE and CNC manufacturing techniques maintains a flatness tolerance of .0005" and insures exact location of vacuum grooves, channels and hole patterns.
Item Pictures Our Stock No. NT-904-0008
