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> 6"-8" wafer sorter handling robot w/vacuum chuck stage
6"-8" wafer sorter handling robot w/vacuum chuck stage
The vacuum chuck/ wafer stage is about 21cm diameter on top, and is driven up/down by a stepper motor/screw drive with linear bearings to keep it straight. The rotation and advance/retract are also driven by stepping motors. The other two main parts are for holding wafer carriers, and their tops measure 22cm square. They have switches to tell the system when the carrier is present. Also included in this lot are a joystick control, a vacuum switching panel and a few interconnection cables.
