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Compact tube furnace with 4"quartz tube & vacuum flange


- Digits show thermostat plate
Compact RTP Tube Furnace with 4" Quartz Tube & Vacuum Flange up to 1100C and Control Software
RTP-1000D4 is compact rapid thermal processing tube furnace with 4" I.D. processing quartz tube and vacuum flange. It is designed for annealing semiconductor wafer ro solar cell up to 3" diameter. RTP-4 is heated by 10KW halogen light with max. 120oC/second heating rate. 50 segment precision temperature controller is built in with +/-1oC. accuracy. RS485 port and control software are included to allow you running furnace and monitoring temperature profile via PC.
* Furnace structure: Double layer steel case with mullite liner without water cooling or air cooling
* Heating element: 8 pcs Halogen light tube ( D=10 L=300 T =200, mm )
* Heating zone: 12" length with 4" constant temperature zone within +/-1oC uniformity
* Quart Tube size: 4.33" O.D x 4.05" I.D x 15" Length
* Vacuum Flange: Made of stainless steel with double hi-temp. silicone O-ring, ball valves and water cooling jacket
o only require water cooling in long time running at > 900oC
o Circulating water rate: 0.5 m3 /hr
* Vacuum pressure: Depended on vacuum pump pressure limit ( pump not included, please click underlined to order separately )
* Vacuum gauge (optional): CE certified vacuum gauge with a measurement range from 10 mtorr~1000 torr.
* Flow meter (optional): Compact Direct Read Flow Meter, 6-60/100 cc/min. with 1/4 NPT male fitting
* Temperature control: PID automatic control via SCR ( Silicon Controlled Rectifier) power control, e.g. current limiting phase angle fired the resistor.
o 30 segments programmable precision controller with auto tune function o Built in protection from overheated and broken thermal couple o Temperature control accuracy: +/- 0.5oC o Built in RS485 port for PC control
o Software is included ( Window XP English version required, computer is not included, but 9" screen laptop with operation software installed is available as option at $600 extra cost )
* Max. Heating Rate: 50 oC/sec recommended, and 120oC/sec. for short time
* Working Temperature: 1000oC Max.
* Power Input: 208-240 AC, 50/60 Hz single phase, 9 KW Max. ( > 60A breaker required)
* Dimension: 760 X 330 X 530 mm ( 30"W x 13"L x 21" H )
* Net weight: 45 kg ( 100 lbs )
* Warranty: One year limited ( not including halogen light damaged by user )
Digital vacuum gauge was installed for immediate use
Furnace can be heated to 1100oC at 120 oC/second, and fast cooling by opening cover
Sliding flange make an easy way for sample loading. Quartz sample holder can handle 3" wafer max. Insertable thermal-couple can reach the central point of processing tube which allows for accurate measurement.
and standard accessories listed below:
Digital Vacuum Gauge Up to 10 -4 Torr
Refractory gloves , Fire-proof upto 900 oC
Quartz Tube: 4.33" O.D x 4.05" I.D x 15" Length for RTP Tube Furnace - RTP-1000D4



Compact tube furnace with 4