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> Cti retrofast on-board 8 high vacuum cryopump anelva
Cti retrofast on-board 8 high vacuum cryopump anelva
CTI RetroFast On-Board 8 High Vacuum Cryopump
Specifications are from CTI and may vary slightly due to upgrades, options, or revisions this unit may or may not have.
CTI-Cryogenics' pioneering cryopumps with fully integrated controls and supporting peripherals speeds integration and system operation
Consistent process performance
Higher tool productivity via significantly increased cryopump uptime
Regenerates in half to one-third the time of a typical Cryo-Torr cryopump application
Fast Regen capability extends cryopump performance between regenerations
Simultaneous regeneration capability, enabled by networking your cryopumps, speeds overall system regeneration, increasing tool uptime
On-Board cryogenic vacuum pumps incorporate embedded microprocessor control to enhance performance, perform diagnostic routines and provide communication capability. On-Board solutions include sophisticated software and easy-to-use graphical user interfaces to significantly improve the performance and operation of the cryopump. Today, the On-Board Cryopump is the standard of the world for reliability and performance.
On-Board Cryopumps provide clean, reliable, high-speed pumping for critical vacuum process applications, ensuring high product yields and process throughputs. They are available in a complete range of sizes to fit any application requirement.
Vacuum Flange ID: 200 mm (ANSI)
Argon Throughput: 700 SCCM (9 Torr-l/sec)
Full Regeneration (Typical): <2.7 hrs
Fast Regeneration (Typical): <1.0 hrs
* Picture 6 - Serial Number Tag
