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Commonwealth scientific ion beam etch/deposition system
Commonwealth Scientific Ion Beam Etch/Deposition System
For sale- a Commonwealth Scientific, now a part of Veeco, Ion Beam Deposition system. Actually the tag on the sputtering enclosure lists the model as Etch/Dep. I have bought and sold a number of sputtering systems over the years, so thin film deposition is not entirely a mystery to me, but etching is a process I am less familiar with. I think if you look at the pictures of the interior of the chamber it would appear that gold was the element being deposited. I will no doubt try to recover some of the loose gold leaf you see in the pictures prior to resale, so it might not be quite so shiny when you get it. But I promise to be gentle.
The surplus condition code for this equipment would theoretically indicate the system to be functional. It comes from a research rather than a production facility. I have no means of testing it and I cannot make any assurances that in fact it was working when it was removed from service. In truth I think you would be foolish to assume you can plug in a few cables and go right back to work with it. I would budget for at least some modest repairs or refurbishing, and then be pleasantly surprised if it doesn t need it. Sold without warranty.
I do not see any evidence that the system has been scavenged for parts. It looks like perhaps the exhaust plumbing on the ASC Cryogenics Cryoplex 8 pump might need some work, but other than that I leave it to you to examine the pictures provided and determine if the system might be suitable for your application. It looks like that vacuum pump has a value of $2K just as a rebuildable core even if it doesn t work. There is a CTI Cryogenics 8200 compressor not shown that is included in the sale as well.
And then there is the electronics rack. There are two, count em two, Commonwealth Scientific IBS 600 power supplies. I have seen some references to dual source ion beam associated with Commonwealth, and given the redundant PS I guess that is probably applicable here. I have found this same PS listed online for $4500 each, so the asking price of the WHOLE SYSTEM is less than what the 2 power supplies and the cryopump might be worth. Also in the rack is a Granville Phillips 307 Vacuum Gauge Controller, a CTI Cryogenics Temperature Indicator, and GE-Fanuc Series 90-30 Programmable Logic Controller system. More perhaps, but that much for sure.
Not shown in the pictures I have a box of cables, which may or may not represent all the cabling you need to make it work. Whatever I have in the box is what you will get. There is documentation in the cable box as well, but I don t have it here to examine so until I can retrieve it I cannot provide you with any info from it. And certainly I will be unable to answer any technical questions. Maybe once I have the manual, but until then I basically don t have a clue. The sputtering chamber is 18 inches wide, 18 inches deep, and 23 inches tall. Those are updated actual dimensions now that I had a chance to measure it. The overall assembly including the base with the cryopump and all the plumbing pictured stands about 6 feet tall including the gizmos on top.
UPDATE: I have retrieved the Trivac pump, the cable box and the manual. From the manual I can confirm that this is a dual source ion beam system, one referred to in the manual as an 8-CM and the larger one as a 12-CM. I don t know if that is a model number or a reference to the size. The 8-CM is also referred to as an IBD 800, but I don t see any futther reference for the 12-CM. The chamber is fitted with a CSC model 27550 Target Assembly, which holds three 6 targets and I guess rotates them into position. Between the chamber and the cryopump there is a High Vacuum Apparatus 120 Series Stainless Steel Gate Valve.
From a visual inspection the stainless vacuum chamber appears to be liquid cooled. Sorting through the cable box it would seem that an effort was made to include the requisite cabling, but until I have the sputtering chamber and the electronics rack in house to match the cables up with I can t say that it is complete. The box also held the braided stainless helium lines to go between the compressor and the cryopump, plus a couple of small controllers. One of the controllers is for the GE-FANUC PLC system, the other I have no idea.
Please check out my other listings for more interesting lab and optical equipment. Check back often!
